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The purpose of this paper is to show the evolution of microsystems together with modeling methods in the space of dozen years as a result of finished research in the frame of several projects.

In this paper several approaches are presented. First, microsystems were built in multi project wafer technology. They were demonstrators like micromotor, micromirrors or micropumps modeled using dedicated design tool. A multi purpose chip was also designed using HDL description and FEM simulations. The next project concerned chemical sensors, where specialized models were developed and implemented in VHDL‐AMS in order to perform multidomain behavioral simulations. Dedicated tools were also developed for medical applications.

The evolution of MEMS technology is strictly connected with simulation and modeling methods. The success and short time to market need fast and accurate simulation methods. This paper shows that the approach depends on application. Moreover, it is connected with the access to the technology.

This paper presents a brief overview on projects performed in DMCS‐TUL department. It shows the evolution of modeling methods and technology used in developing and fabrication of microsystems for various applications.